Indexed metadata
Effect of rapid thermal annealing on damage of silicon matrix implanted by low-energy rhenium ions
I.N. Demchenko, Y. Melikhov, M.S. Walczak, R. Ratajczak, K. Sobczak, A. Barcz, R. Minikaev, E. Dynowska, J.Z. Domagala, M. Chernyshova, Y. Syryanyy, N.V. Gavrilov, M. Sawicki
Source record
Source: Crossref
Published: Dec 1, 2020
DOI: 10.1016/j.jallcom.2020.156433
Open original source ↗Evidence graph
No public relationships recorded yet.
Integrity note: This page is a factual metadata record created by deterministic ingestion. It is not a claim that the work moves a mathematical frontier or has been independently verified.