Simulation-driven 3D line roughness reconstruction: A proof-of-concept deep learning framework for SEM metrology

Haewon Jung, Hoon Kang, In-Yong Park, Dal-Jae Yun

Source record

Source: Crossref

Published: Aug 1, 2026

DOI: 10.1016/j.micron.2026.104101

Open original source ↗

Evidence graph

No public relationships recorded yet.

Integrity note: This page is a factual metadata record created by deterministic ingestion. It is not a claim that the work moves a mathematical frontier or has been independently verified.