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Estimation of Line Cross Sections Using Critical-Dimension Grazing-Incidence Small-Angle X-Ray Scattering
Guillaume Freychet, Dinesh Kumar, Ron J. Pandolfi, Patrick Naulleau, Isvar Cordova, Peter Ercius, Chengyu Song, Joseph Strzalka, Alexander Hexemer
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Source: Crossref
Published: Oct 11, 2019
DOI: 10.1103/physrevapplied.12.044026
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