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Clear Experimental Proof of the Compliant Behavior of Free-Standing Si Nanostructures on SOI for Ge Nanoheteroepitaxy by GI-XRD

Thomas Schroeder, Grzegorz Kozlowski, Peter Zaumseil, Yuji Yamamoto, Joachim Bauer, Tobias Schulli, Bernd Tillack

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Source: Crossref

Published: Jun 1, 2012

DOI: 10.1109/istdm.2012.6222443

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