Single Proof Mass Resonant MEMS Accelerometer With Parallel Motion Linkage Amplifier

Alexandra Zobova, Maxim Drizovsky, Omer HaLevy, Neta Melech, Shmuel Livne, Slava Krylov

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Source: Crossref

Published: Dec 1, 2024

DOI: 10.1109/lsens.2024.3507075

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