Mechanical-chemical synergy in photochemical mechanical polishing monocrystalline yttrium aluminum garnet: An integrated machine learning, response surface, and mathematical methodology

Xingchen Guo, Jinxing Huang, Zhigang Dong, Renke Kang, Shang Gao

Source record

Source: Crossref

Published: Mar 1, 2026

DOI: 10.1016/j.aei.2025.104198

Open original source ↗

Evidence graph

No public relationships recorded yet.

Integrity note: This page is a factual metadata record created by deterministic ingestion. It is not a claim that the work moves a mathematical frontier or has been independently verified.