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Vertical capacitive energy harvester positively using contact between proof mass and electret plate - Stiffness matching by spring support of plate and stiction prevention by stopper mechanism

Tomokazu Takahashi, Masato Suzuki, Toshio Nishida, Yasuhiro Yoshikawa, Seiji Aoyagi

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Source: Crossref

Published: Jan 1, 2015

DOI: 10.1109/memsys.2015.7051167

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Vertical capacitive energy harvester positively using contact between proof mass and electret plate - Stiffness matching by spring support of plate and stiction prevention by stopper mechanism — Mathematical Frontier Network