The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting

Dongna Shen, Jung-Hyun Park, Jyoti Ajitsaria, Song-Yul Choe, Howard C Wikle, Dong-Joo Kim

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Source: Crossref

Published: Apr 4, 2008

DOI: 10.1088/0960-1317/18/5/055017

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