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Miniaturization of Highly Sensitive Single-Axis Gold Proof-mass MEMS Accelerometer for Wearable Device
Torauto Yamada, Chihaya Mukaide, Tomoyuki Kurioka, Gen Hikosaka, Katsuyuki Machida, Tso-Fu Mark Chang, Yoshihiro Miyake, Masato Sone, Hiroyuki Ito
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Source: Crossref
Published: Sep 16, 2026
DOI: 10.7567/ssdm.2026.k-3-01
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